Plasma treatment processes, whether atmospheric or low pressure, can generate ozone and other reactive species as materials are surface activated. Plasma jets are particularly well suited for complex, three dimensional parts and precision components, including automotive components, EV battery parts and medical devices, where plasma jets can direct treatment exactly where it is needed. These emissions can accumulate around treatment chambers and inline systems, affecting operator exposure and process environment. Fumex source capture systems remove ozone and process gases directly at the treatment point, supporting safer operational environments.